Thu, 14 Jul, 13:40 - 14:00 Denver Time (UTC -7)
TH-A3.2P.2: Machine-Learning-Based Deep-Sub-Wavelength Metrology with Uncertainty Quantification
Yanan Liu, Lynford L. Goddard, Jian-Ming Jin, University of Illinois at Urbana-Champaign, United States; Jinlong Zhu, Huazhong University of Science and Technology, China