10-15 July 2022 • Denver, Colorado, USA

IEEE AP-S/URSI 2022

10-15 July 2022 • Denver, Colorado, USA

TH-A3.2P.2

Machine-Learning-Based Deep-Sub-Wavelength Metrology with Uncertainty Quantification

Yanan Liu, Lynford L. Goddard, Jian-Ming Jin, University of Illinois at Urbana-Champaign, United States; Jinlong Zhu, Huazhong University of Science and Technology, China

Session:
Macromodeling and Optimization Methods

Track:
AP-S: Computational & Numerical Techniques

Location:
Capitol Ballroom 5 (HR)

Presentation Time:
Thu, 14 Jul, 13:40 - 14:00 Denver Time (UTC -7)

Session Co-Chairs:
Gaeron Friedrichs, University of Colorado Boulder and Sawyer D. Campbell, The Pennsylvania State University
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