Machine-Learning-Based Deep-Sub-Wavelength Metrology with Uncertainty Quantification
Yanan Liu, Lynford L. Goddard, Jian-Ming Jin, University of Illinois at Urbana-Champaign, United States; Jinlong Zhu, Huazhong University of Science and Technology, China
Session:
Macromodeling and Optimization Methods
Track:
AP-S: Computational & Numerical Techniques
Location:
Capitol Ballroom 5 (HR)
Presentation Time:
Thu, 14 Jul, 13:40 - 14:00 Denver Time (UTC -7)
Session Co-Chairs:
Gaeron Friedrichs, University of Colorado Boulder and Sawyer D. Campbell, The Pennsylvania State University